Sensors and Actuators A Physical · 2012 · 47 citations · 27 references
EngineeringElectrical EngineeringMechanical EngineeringActuatorsMicroelectromechanical SystemsMicrofabricationFerroelectric CeramicsMems DesignMems ResonatorsPiezoelectric ActuatorsPiezoelectric CeramicsPiezoelectric MaterialsMicroscale Piezoelectric DevicesPiezoelectric PropertiesPiezoelectric ResonatorsResonant FrequencyResonant Frequency Control
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Engineering, Mechanical Engineering, Mechatronics Engineering +14