Wet thermal oxidation of AlAsSb against As/Sb ratio

Abstract

The authors describe lateral steam oxidation of the AlAsSb material system, varying the As/Sb ratio. Large oxidation depths are obtained for a variety of As/Sb ratios, as long as both As and Sb are present. In comparison, oxidation of AlAs is much slower, whereas AlSb does not appear to oxidise at all. Qualitatively different oxides are obtained from AlAs0.56Sb0.44 and AlAs0.16Sb0.84.