Oxidation of macroporous silicon for thick thermal insulation

Formation and application of porous silicon

H. Föll, M. Christophersen, Jürgen Carstensen et al. · Materials Science and Engineering R Reports · 2002 · 765 citations

Materials Science, Materials Engineering, Engineering +5

The kinetics and mechanism of oxide layer formation from porous silicon formed on <i>p</i>-Si substrates

J. J. Yon, K. Barla, R. Hérino et al. · Journal of Applied Physics · 1987 · 121 citations

Silicate Ceramics, Engineering, Nanoporous Material +18

Stress in oxidized porous silicon layers

K. Barla, R. Hérino, G. Bomchil · Journal of Applied Physics · 1986 · 64 citations

Materials Science, Layer Thickness, Engineering +11

<i>P</i>-type macroporous silicon for two-dimensional photonic crystals

Paolo Bettotti, Luca Dal Negro, Z. Gaburro et al. · Journal of Applied Physics · 2002 · 57 citations

Photonic Sensor, Optical Materials, Engineering +18

Thick oxidised porous silicon layers for the design of a biomedical thermal conductivity microsensor

Ph. Roussel, Vladimir Lysenko, B. Remaki et al. · Sensors and Actuators A Physical · 1999 · 37 citations

Engineering, Microfabrication, Applied Physics +8