Nano-patterning by pulsed laser irradiation in near field

Finer features for functional microdevices

Satoshi Kawata, Hong‐Bo Sun, Tomokazu Tanaka et al. · Nature · 2001 · 2.8K citations

Engineering, Computer Engineering, Functional Materials +12

Near-field direct-write ultraviolet lithography and shear force microscopic studies of the lithographic process

Igor I. Smolyaninov, D.L. Mazzoni, Christophér C. Davis · Applied Physics Letters · 1995 · 98 citations

Natural Sciences, Materials Engineering, Materials Science +9

Three-dimensional effects in dry laser cleaning

Boris Luk’yanchuk, N. Arnold, S-M Huang et al. · Applied Physics A · 2003 · 95 citations

Engineering, Materials Engineering, Materials Science +14

Sub-30 nm lithography with near-field scanning optical microscope combined with femtosecond laser

Yu‐Sheng Lin, Minghui Hong, W.J. Wang et al. · Applied Physics A · 2004 · 83 citations

Engineering, Manufacturing Engineering, Materials Science +13

Near field optics: Snapshot of the field emitted by a nanosource using a photosensitive polymer

Stéphane Davy, M. Spajer · Applied Physics Letters · 1996 · 69 citations

Natural Sciences, Materials Engineering, Materials Science +14