Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 13 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceMetallic MaterialsMetallurgySurface ScienceElectron Beam PhysicsThin-film DepositionBeam Deposition PhysicsBeam Interactions With MatterElectron Beam EvaporationElectron Beam FocusingHigh-intensity Beam PhysicsTungsten-based Materials
Tungsten films were deposited by decomposing films of frozen tungsten hexafluoride (WF6) with an electron beam and then warming the substrate to remove unreacted WF6. Deposition rates increase with increasing beam intensity.