Concepedia

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Ultra low energy (100–2000 eV) boron implantation into crystalline and silicon-preamorphized silicon

DOI

28

Citations

19

References

1991

Year

A. Bousetta, Jaap van den Berg, Řeža Valizadeh, D. Armour, P. C. Zalm
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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