Electrochimica Acta · 2005 · 10 citations · 15 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsChemical Vapor DepositionPhysical Vapor DepositionSurface PhysicsThin Film OxidationThin-film DepositionThin-film MaterialsBoron ChemistryChemical Vapor Deposition MaterialsPrecursor ChemistryPrecursor Design
15
Konosuke INAGAWA, Keiichiro Watanabe, H. Ohsone et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 127 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +13