PECVD of h-BN and c-BN films from boranedimethylamine as a single source precursor

Giovanni A. Battiston, Davide Berto, Annalisa Convertino, Dario Emiliani, Albert Figueras, R. Gerbasi, S. Viticoli

Electrochimica Acta · 2005 · 10 citations · 15 references

Concepts

References

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