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EngineeringMechanical EngineeringMechatronics EngineeringAcousticsMachine VibrationTransducer TechnologyUltrasonicsUltrasonic PropagationUltrasonic Waves
5
Microfabrication of Piezoelectric MEMS
J. Baborowski · Journal of Electroceramics · 2004 · 86 citations
Engineering, Electrical Engineering, Mechanical Engineering +12
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Engineering, Electrical Engineering, Mechanical Engineering +11
Design of thin cross type ultrasonic motor
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Engineering, Electrical Engineering, Mechanical Engineering +7