Microelectronic Engineering · 2007 · 57 citations · 2 references
EngineeringMaterials EngineeringMaterials ScienceNanotechnologyPhotonicsSensorsForce SensingForce SensorsMechanical SensorsPhotonic CrystalsPhotonic MaterialsTactile SensingForce Sensing MaterialsMechanical SensingOptical Force SensorsPhotonic Crystal SensorsTwo-dimensional Photonic Crystals
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