Focused electron beam-induced deposition at cryogenic temperatures

Gas-assisted focused electron beam and ion beam processing and fabrication

Ivo Utke, P. Hoffmann, J. Melngailis · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 1K citations · Full text

Engineering, Materials Engineering, Materials Science +16

Determination of Kilovolt Electron Energy Dissipation vs Penetration Distance in Solid Materials

T. E. Everhart, Peter Hoff · Journal of Applied Physics · 1971 · 805 citations

Engineering, Materials Science, Physics +13

CASINO: A new monte carlo code in C language for electron beam interaction —part I: Description of the program

Pierre Hovington, Dominique Drouin, Raynald Gauvin · Scanning · 1997 · 637 citations

Medicine, Computer Engineering, Radiation Detection +16

A critical literature review of focused electron beam induced deposition

Willem F. van Dorp · Journal of Applied Physics · 2008 · 506 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +12

Focused, Nanoscale Electron-Beam-Induced Deposition and Etching

Steven Randolph, Jason D. Fowlkes, Philip D. Rack · Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences · 2006 · 414 citations

Engineering, Materials Engineering, Materials Science +15