Concepedia
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 11 citations · 0 references
Open access
EngineeringMechanical EngineeringRobotics EngineeringMechatronicsRobot DesignRoboticsKinematic DesignManipulator DesignRobot ManipulatorsVacuum End-effector DesignVacuum Systems