Concepedia

Non-regular depth profiles of light ions implanted into organic polymer films

D. Fink, Martin Müller, U. Stettner, M. Behar, P.F.P. Fichtner, F.C. Zawislak, Sohan L. Koul

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1988 · 41 citations · 4 references

DOI

Concepts

References

4

A Monte Carlo computer program for the transport of energetic ions in amorphous targets

J.P. Biersack, L.G. Haggmark · Nuclear Instruments and Methods · 1980 · 4.7K citations

, , +16

The use of neutron induced reactions for light element profiling and lattice localization

J.P. Biersack, D. Fink, R. Henkelmann et al. · Nuclear Instruments and Methods · 1978 · 86 citations

, , +11

Distributions of light ions and foil destruction after irradiation of organic polymers

D. Fink, J.P. Biersack, J. T. Chen et al. · Journal of Applied Physics · 1985 · 76 citations

, , +14

Mass and energy dependence of implanted ion profiles in the AZ111 photoresist

R. B. Guimarães, M. Behar, R. Livi et al. · Journal of Applied Physics · 1986 · 31 citations

, , +12