Nucleation and formation of oxygen precipitates in Czochralski grown silicon annealed under uniform stress conditions

Oxygen precipitation in silicon

A. Borghesi, B. Pivac, A. Sassella et al. · Journal of Applied Physics · 1995 · 488 citations

Natural Sciences, Materials Engineering, Materials Science +11

Oxygen precipitation in silicon

W. Patrick, E. E. Hearn, W. A. Westdorp et al. · Journal of Applied Physics · 1979 · 442 citations

Natural Sciences, Materials Engineering, Materials Science +11

Precipitation of oxygen in silicon kinetics, solubility, diffusivity and particle size

R.C. Newman, M. J. Binns, W. P. Brown et al. · Physica B+C · 1983 · 38 citations

Natural Sciences, Materials Engineering, Materials Science +13

Stress-induced oxygen precipitation in CzSi

A. Misiuk, B. Surma, J. Härtwig · Materials Science and Engineering B · 1996 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +2

DLTS study of oxygen precipitates in silicon annealed at high pressure

I. V. Antonova, A. Misiuk, V. P. Popov et al. · Physica B Condensed Matter · 1996 · 22 citations

Natural Sciences, Materials Engineering, Materials Science +12