Publication | Closed Access
Use of multilayer techniques for XPS identification of various nitrogen environments in the Si/NH3 system
122
Citations
13
References
1991
Year
Materials EngineeringSi/nh3 SystemElectrical EngineeringMultilayer TechniquesEngineeringXps IdentificationSurface ScienceApplied PhysicsChemistryMicroelectronics
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