Use of multilayer techniques for XPS identification of various nitrogen environments in the Si/NH3 system

Photoemission studies of the reactions of ammonia and N atoms with Si(100)-(2×1) and Si(111)-(7×7) surfaces

F. Bozsó, Phaedon Avouris · Physical review. B, Condensed matter · 1988 · 143 citations

Natural Sciences, Chemistry, Physics +17

Photoemission study of ammonia dissociation on Si(100) below 700 K

E.K. Hlil, L. K�ubler, J.L. Bischoff et al. · Physical review. B, Condensed matter · 1987 · 115 citations

Natural Sciences, Materials Science, Physics +17

Thermal nitridation of silicon: An XPS and LEED investigation

C. Maillot, H. Roulet, G. Dufour · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1984 · 101 citations

Natural Sciences, Materials Engineering, Materials Science +17

Si-H bond production by NH3 adsorption on Si(111): An UPS study

L. K�ubler, E.K. Hlil, D. Bolmont et al. · Surface Science · 1987 · 75 citations

Natural Sciences, Chemistry, Materials Science +15

XPS characterization of ultrafine Si ₃ N ₄ powders

I. Bertóti, G. Varsányi, G. Mink et al. · Surface and Interface Analysis · 1988 · 60 citations

Natural Sciences, Materials Engineering, Materials Science +16