The contribution of fast neutrals to cathode erosion in glow discharges

Abstract

We calculate the rate at which a target located at the cathode of a glow discharge is sputtered. The calculation involves two steps: (1) evaluation of the energy distribution functions of ions and neutrals impinging on the target; and (2) convolution of these distributions with known sputtering functions. We show that under certain conditions, charge-exchange collisions lead to sputtering predominantly by fast neutrals.