Effects of oxygen plasma treatments on the formation of ohmic contacts to GaN - Concepedia

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Effects of oxygen plasma treatments on the formation of ohmic contacts to GaN

28

Citations

9

References

2004

Year

Junjie Yan, M. J. Kappers, Z. H. Barber, C. J. Humphreys

Applied Surface Science

Wide-bandgap SemiconductorElectrical EngineeringEngineeringPhysicsSurface ScienceApplied PhysicsOxygen Plasma TreatmentsGallium OxideGan Power DeviceOhmic ContactsCategoryiii-v SemiconductorOptoelectronics

References

	Year	Citations

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