Publication | Closed Access
Nano-scale patterning using the roll typed UV-nanoimprint lithography tool
68
Citations
3
References
2008
Year
Materials ScienceEngineeringBeam LithographyMicrofabricationNanotechnologyApplied PhysicsNano-scale PatterningPattern TransferNanolithographyNanofabrication3D PrintingNanolithography Method
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