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Influence on the laser induced backside dry etching of thickness and material of the absorber, laser spot size and multipulse irradiation

Laser OpticsLaser Spot SizeEngineeringOptical PropertiesApplied PhysicsLaser ApplicationsDry EtchingLaser AblationLaser Processing TechnologyLaser-assisted DepositionPlasma EtchingOptoelectronicsMultipulse Irradiation