Concepedia

Micromachining of ceramics with excimer laser radiation

M. Göller, Norbert W. Lutz, M. Geiger

Journal of the European Ceramic Society · 1993 · 12 citations · 2 references

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Concepts

References

Concepts

EngineeringMaterials EngineeringMaterials ScienceCeramic MaterialsCeramicsMicrofabricationCeramic ProcessingLaser Material ProcessingLaser Surface ProcessingMicrofabrication MaterialsMicromachiningMicrostructure ControlExcimer LasersLaser MicromachiningUltrafast Laser Micromachining

References

2

Influence of the beam spot size on ablation rates in pulsed-laser processing

M. Eyett, D. Bäuerle · Applied Physics Letters · 1987 · 98 citations

Natural Sciences, Materials Engineering, Materials Science +12

<title>Processing of ceramics by excimer lasers</title>

Isamu Miyamoto, Hiroshi Maruo · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1990 · 17 citations

Engineering, Materials Engineering, Materials Science +17