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A systematic study on metal-assisted chemical etching of high aspect ratio silicon nanostructures

Materials ScienceChemical EngineeringWafer Scale ProcessingSystematic StudyEngineeringMicrofabricationNanotechnologyMetal-assisted Chemical EtchingSurface ScienceApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsPlasma EtchingNanolithography MethodNanostructures