Electron-impact-ionization cross sections of inner shells measured by Auger-electron spectroscopy

Abstract

Absolute values of inner-shell ionization cross sections have been obtained by electron impact using Auger-electron spectroscopy with gaseous samples. Values of the ${L}_{2,3}$-shell cross sections of Si, P, S, Cl, and Ti and the ${M}_{4,5}$-shell cross sections of Br and Sn are reported for incident-electron energies between 500 and 2500 eV. The corrections due to a hole redistribution by Coster-Kronig transitions are discussed.