Physical review. B, Condensed matter · 1997 · 19 citations · 22 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials PhysicsSurface ChemistrySurface ScienceAuger Electron SpectroscopyElectron DiffractionSurface CharacterizationSurface CrystallographySurface ModificationSurface PhysicsElectron Diffraction Of SurfacesLow-energy Electron SpectroscopyMetalorganic Vapor Phase EpitaxyReflectance SpectroscopySurface Defects CharacterizationSurface Electronic StructureSurface Reflectance SpectroscopySurface Structure Determination
The structure of InP surfaces prepared by ion bombardment and annealing (IBA) and by decapping of InP (001) samples grown by metal organic vapor phase epitaxy is studied. The structural changes of the surfaces during preparation are monitored by low-energy electron diffraction and related to the surface electronic modifications as revealed by reflectance-anisotropy spectroscopy (RAS). For both preparation methods we find (2\ifmmode\times\else\texttimes\fi{}4) reconstructions and almost identical RAS spectra. This finding contrasts with previous reports usually claiming a (4\ifmmode\times\else\texttimes\fi{}2) surface after IBA Auger-electron spectroscopy as well as hydrogen-adsorbate vibrations recorded with high-resolution electron-energy spectroscopy indicate an In-rich surface stoichiometry.
22
GaAs surface control during metalorganic vapor phase epitaxy by reflectance anisotropy spectroscopy
F. Reinhardt, W. Richter, A. B. Müller et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 67 citations
Natural Sciences, Materials Engineering, Materials Science +17