Journal of Crystal Growth · 2002 · 71 citations · 12 references
Natural SciencesMaterials EngineeringMaterials ScienceCeramicsElectronic MaterialsThin FilmsChemical Vapor DepositionEpitaxial GrowthHeat Transfer In ReactorsSemiconductor Crystal GrowthSemiconductor HeterostructuresThermal Properties Of SemiconductorsAtomic Layer EpitaxyChemical Beam EpitaxyEpitaxial Film GrowthEpitaxial Growth KineticsSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon Carbide Crystal GrowthSilicon Epitaxy
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Growth of SiC by ?Hot-Wall? CVD and HTCVD
Olof Kordina, C. Hallin, Anne Henry et al. · physica status solidi (b) · 1997 · 127 citations