Threshold voltage control of InAlN/GaN heterostructure field-effect transistors for depletion- and enhancement-mode operation

Abstract

We describe a method to change the threshold voltage of heterostructure field-effect transistors (HFETs) using InxAl1−xN/GaN heterostructures by using polarization and strain modification in the InAlN barrier layer to realize enhancement-mode operation. The threshold voltage and electronic band structure of the heterostructures were calculated for different indium compositions in the InAlN layer. Band structure calculations predict the enhancement-mode operation of compressively strained InAlN/GaN HFETs with an indium composition higher than 0.25. Studies of InAlN/GaN HFETs with different In alloy compositions show that the sheet resistance increases and the carrier concentration decreases for the heterostructures with increasing indium composition due to changes in the compressive strain and polarization in the InAlN barrier layer. Fabricated HFETs show threshold voltages of −2.5, −0.75, and +0.2 V for In∼0.18Al∼0.82N/GaN, In∼0.22Al∼0.78N/GaN, and In∼0.25Al∼0.75N/GaN HFETs, respectively, corresponding to a shift from depletion-mode to enhancement-mode operation.