Journal of Micromechanics and Microengineering · 2008 · 32 citations · 15 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectromechanical SystemsMicrofabricationThin FilmsLaser Material ProcessingMems FabricationMems MaterialsMicrofabrication ProcessesPiezoelectric MaterialsPolymer Thin FilmsDamage ThresholdsLaser MicromachiningMaterial AblationPiezoelectric PolymersPiezoelectric Thin FilmsPolymers In Mems FabricationThin-film PiezoelectricsUltrafast Laser Micromachining
NRC publication: Yes
15
Laser ablation of dielectrics with temporally shaped femtosecond pulses
Razvan Stoian, M. Boyle, A. Rosenfeld et al. · Applied Physics Letters · 2002 · 185 citations