Journal of Mechanical Science and Technology · 2013 · 28 citations · 17 references
EngineeringManufacturing EngineeringMaterials EngineeringManufacturing ProcessesMaterials ProcessingSustainable ManufacturingCleaner ProductionEnvironmental DegradationGreen ManufacturingPolishing OperationsSustainable ProductionSustainable Production SystemsChemical-mechanical Polishing CleanlinessManufacturingPolishing ProcessesPolishing-induced Surface DamageProcess Environmental Impact AssessmentSustainable Manufacturing ProcessesSustainable Manufacturing Systems
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