Publication | Closed Access

Porous-pyramids structured silicon surface with low reflectance over a broad band by electrochemical etching

Materials ScienceElectrochemical EtchingEngineeringMicrofabricationNanotechnologyNanoelectronicsSurface ScienceApplied PhysicsSilicon SurfaceLow ReflectanceSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsPlasma EtchingNanolithography Method