Applied Surface Science · 2012 · 16 citations · 15 references
EngineeringMaterials EngineeringMaterials ScienceMetallic MaterialsSurface EngineeringSurface ScienceElectron Beam LithographyElectron Beam PhysicsElectron MicroscopySurface ModificationSurface Pattern DesignSurface PhysicsElectron Beam FocusingElectron Beam Lithography MasksMetal Plate LithographyPlate FabricationScanning Electron Microscopy Surface AnalysisSurface Topography Modification
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