Smooth and oriented AlN thin films deposited by laser ablation and their application for SAW devices - Concepedia

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Smooth and oriented AlN thin films deposited by laser ablation and their application for SAW devices

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References

1999

Year

Jens Meinschien, G. Behme, F. Falk, H. Stafast

Applied Physics A

Materials ScienceAluminium NitrideAdvanced Laser ProcessingEngineeringMicrofabricationSurface ScienceApplied PhysicsLaser AblationSaw DevicesLaser Processing TechnologyLaser-assisted DepositionThin FilmsAln Thin Films

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