Characterization of a traceable profiler instrument for areal roughness measurement

Abstract

A two-dimensional profiler instrument was designed and realized at the PTB (Physikalisch-Technische Bundesanstalt). The main function of the instrument is to provide traceable results in the field of roughness measurement. It is equipped with a linear moving stylus which is guided by precision air bearings. The moving part of the stylus has weight around 1 g and is carried by a magnetic field. The contacting force of the tip onto the surface under test is controlled by a small voice coil actuator in a closed control loop. Vertical movements of the stylus are captured by two different, completely independent measurement systems, covering a range of 100 µm. The first one is an interferometer, which provides a traceable signal, and the second one is an inductive measurement system. The signal from the inductive measurement system is calibrated by the interferometer. The sample under test is carried within the x–y-plane by a linear guided table with low noise air bearings. These air bearings are preloaded by vacuum and a constant gap is achieved by gas pressure controllers. Both axes of the table are driven by linear voice coil actuators and their movement in the plane is measured by linear encoders. The sample carrier is equipped with two axes tilt compensation, by which the sample under test can be levelled automatically using the measurement system of the stylus. Real-time data acquisition, manual handling and automated procedures are managed by a programmable controller and proprietary software written in LabVIEW. After measurement, data from the system can be directly transferred into the smd- or sdf-format. Results of measurements on different samples to characterize the metrological behaviour of the instrument will be reported. To characterize the uncertainty of the instrument, a model is applied, which is in accordance with approved rules for contact stylus instruments.