Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies

Transport properties of gaseous ions over a wide energy range

H. W. Ellis, R. Y. Pai, E. W. McDaniel et al. · Atomic Data and Nuclear Data Tables · 1976 · 947 citations

Engineering, Ion Exchange, Physics +11

<i>Colloquium</i>:<b>Reactive plasmas as a versatile nanofabrication tool</b>

Kostya Ostrikov · Reviews of Modern Physics · 2005 · 615 citations · Full text

Materials Science, Chemical Engineering, Low-pressure Reactive Plasmas +13

<i>Physics of Atomic Collisions</i>

J. B. Hasted, Sanborn C. Brown · Physics Today · 1965 · 533 citations

Engineering, High-energy Nuclear Reaction, Physics +5

Electron Interactions With SF6

L. G. Christophorou, James K. Olthoff · Journal of Physical and Chemical Reference Data · 2000 · 460 citations

Engineering, Cross Sections, Physics +13

The application of scattering cross sections to ion flux models in discharge sheaths

A. V. Phelps · Journal of Applied Physics · 1994 · 433 citations

Engineering, Glow Discharge, Plasma Physics +16