Concepedia

On the temperature dependence of Na migration in thin SiO2 films during ToF-SIMS O2+ depth profiling

Stefan Krivec, Thomas Detzel, Michael Buchmayr, Herbert Hutter

Applied Surface Science · 2010 · 15 citations · 16 references

DOI

Concepts

References

16

Secondary Ion Mass Spectrometry

Analytica Chimica Acta · 1993 · 1.1K citations

, , +16

Static secondary ion mass spectrometry (S-SIMS) Part 1: methodology and structural interpretation

Luc Van Vaeck, Annemie Adriaens, R. Gijbels · Mass Spectrometry Reviews · 1999 · 195 citations

, , +17

Secondary Ion Mass Spectrometry

Peter Williams · Annual Review of Materials Science · 1985 · 160 citations

, , +16

Applications of Secondary Ion Mass Spectrometry (SIMS) in Materials Science

David S. McPhail · Journal of Materials Science · 2006 · 158 citations

, , +8

Stepwise Growth of Ultrathin SiO<i><sub>x</sub></i> Films on Si(100) Surfaces through Sequential Adsorption/Oxidation Cycles of Alkylsiloxane Monolayers

H. Brünner, Thomas Vallant, U. Mayer et al. · Langmuir · 1996 · 75 citations

, , +17