Chemical vapor deposition of YBa2Cu3O7−<i>x</i> superconducting films

Abstract

Superconducting thin films of YBa2Cu3O7−x have been produced by chemical vapor deposition. Volatile coordination compound precursors of the oxide components, β-diketonates of Y, Ba, and Cu, are thermally decomposed on hot substrates to form crystalline films. The Ba compound was evaporated in the presence of externally added vapors of the β-diketonate to obtain steady evaporative behavior. Superconducting films were obtained on SrTiO3 substrates at temperatures above 800 °C. The best films have onset temperatures of 90 K and loss of resistance as high as 68 K. Epitaxial growth was obtained.