Development of piezoelectric actuators for active X-ray optics

A simple way to make tough ceramics

W.J. Clegg, K. Kendall, Neil McN. Alford et al. · Nature · 1990 · 838 citations

Natural Sciences, Materials Engineering, Materials Science +13

Electroceramic Thick Film Fabrication for MEMS

Robert Dorey, R. W. Whatmore · Journal of Electroceramics · 2004 · 139 citations

Engineering, Materials Engineering, Materials Science +9

Continuous-membrane surface-micromachined silicon deformable mirror

Thomas G. Bifano · Optical Engineering · 1997 · 116 citations

Engineering, Manufacturing Engineering, Microfabrication +14

PZT thin films for piezoelectric microactuator applications

H. Kueppers, T. Leuerer, Uwe Schnakenberg et al. · Sensors and Actuators A Physical · 2002 · 114 citations

Engineering, Materials Engineering, Materials Science +14

<title>Complete characterization of the piezoelectric, dielectric, and elastic properties of Motorola PZT 3203 HD, including losses and dispersion</title>

Stewart Sherrit, H. D. Wiederick, Benoy K. Mukherjee · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 60 citations

Natural Sciences, Electrical Engineering, Materials Science +17