Switching time analysis for non-uniform serpentine flexure based RF-MEMS switches

Abstract

In this paper we present, the switching time analysis for non-uniform serpentine flexure based capacitive radio frequency (RF) micromechanical systems (MEMS) switches. The general equations of spring constant and switching time are developed analytically for the proposed switch and further used to improve the switching time of serpentine flexure based RF MEMS switches. The calculated switching time for 640 µm long fixed-fixed beam is found to be 1–4 millisecond with varying span beam length of 100 to 280 µm.