Applied Surface Science · 2010 · 28 citations · 36 references
Natural SciencesMaterials EngineeringMaterials ScienceMicrofabricationPlasma PhysicsThin FilmsChemical Vapor DepositionPlasma Surface TreatmentThin-film DepositionThin-film MaterialsDeposition RateDeposition Rate ControlFilm DepositionPlasma DepositionPlasma-enhanced Deposition
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Modeling studies of amorphous carbon
David Beeman, J. Silverman, R. Lynds et al. · Physical review. B, Condensed matter · 1984 · 694 citations