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Realization of an ultra-flat silica surface with angstrom-scale average roughness using nonadiabatic optical near-field etching

Materials SciencePhotonicsOptical MaterialsEngineeringAngstrom-scale Average RoughnessPhysicsMicrofabricationOptical PropertiesSurface ScienceApplied PhysicsUltra-flat Silica SurfaceMicro-optical ComponentPlasma EtchingSurface ProcessingNanolithography Method