Dependence of nitriding degree of Ti surface by non-LTE nitrogen plasma on various plasma parameters

Mechanisms of reactive sputtering of titanium nitride and titanium carbide II: Morphology and structure

J.‐E. Sundgren, B.-O. Johansson, Susanne Karlsson et al. · Thin Solid Films · 1983 · 274 citations

Materials Science, Materials Engineering, Engineering +12

Kinetics of Ionization-Recombination of a Plasma and Population Density of Excited Ions. I. Equilibrium Plasma

Takashi Fujimoto · Journal of the Physical Society of Japan · 1979 · 146 citations

Engineering, Plasma Science, Plasma Physics +18

Kinetics of Ionization-Recombination of a Plasma and Population Density of Excited Ions. II. Ionizing Plasma

Takashi Fujimoto · Journal of the Physical Society of Japan · 1979 · 139 citations

Electron Density, Engineering, Physics +15

Kinetics of Ionization-Recombination of a Plasma and Population Density of Excited Ions. III. Recombining Plasma–High-Temperature Case

Takashi Fujimoto · Journal of the Physical Society of Japan · 1980 · 93 citations

Engineering, Plasma Science, Plasma Physics +20

Kinetics of Ionization-Recombination of a Plasma and Population Density of Excited Ions. IV. Recombining Plasma–Low-Temperature Case

Takashi Fujimoto · Journal of the Physical Society of Japan · 1980 · 80 citations

Engineering, Plasma Science, Plasma Physics +18