Publication | Closed Access
Minority-carrier injection into polysilicon emitters
33
Citations
11
References
1982
Year
Electrical EngineeringPolysilicon EmitterEngineeringHole Transport EquationBipolar TransistorAdvanced Packaging (Semiconductors)NanoelectronicsElectronic EngineeringSurface ScienceApplied PhysicsPolysilicon EmittersElectronic PackagingSilicon On InsulatorMicroelectronicsSemiconductor Device
The hole transport equation is solved for a polysilicon emitter of a bipolar transistor. The recombination at the grain boundaries as well as at the poly-monosilicon interface is considered. An effective surface recombination velocity is defined and calculated as a function of surface state density and number of grain boundaries. A comparison between the injected hole current into the diffused region of both an Al contact and a polysilicon-silicon emitter is given as a function of surface state density for different numbers of grain boundaries. Also the injected current is calculated for different values of junction depth and surface concentration.
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