Fabrication of a Nanostructured Diamond Honeycomb Film

Abstract

Micromechanical and electronic devices are a potential application for nanohoneycomb-structured diamond films, which were produced by oxygen plasma etching with porous anodic alumina films as masks to give highly ordered hexagonal hole arrays with high aspect ratios. The high refractive index and high transparency of these structures make them suitable for photonic bandgap materials.