Publication | Closed Access
Nanofabrication using computer-assisted design and automated vector-scanning probe lithography
39
Citations
44
References
2001
Year
Materials ScienceEngineeringVector-scanning Probe LithographyBeam LithographyMicrofabricationNanotechnologyNanomaterialsNanolithographyNanofabricationNanometrologyNanolithography Method
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