Development of coarse/fine dual stage using pneumatically driven bellows actuator and cylinder with air bearings - Concepedia

Concepedia

Publication | Closed Access

Development of coarse/fine dual stage using pneumatically driven bellows actuator and cylinder with air bearings

35

Citations

8

References

2010

Year

Kenji Kawashima, Takeshi Arai, Kotaro Tadano, Toshinori FUJITA, Toshiharu KAGAWA

Precision Engineering

EngineeringMechanical DesignMechanical EngineeringMechatronicsMechanical SystemsAir BearingsPneumaticsBellows ActuatorCoarse/fine Dual StageActuation

References

	Year	Citations

Page 1