Publication | Closed Access
Effect of pad groove geometry on material removal characteristics in chemical mechanical polishing
33
Citations
10
References
2012
Year
Materials ScienceChemical EngineeringMaterial Removal CharacteristicsEngineeringMaterial ProcessingMaterial MachiningMechanical EngineeringPad Groove GeometryChemical Mechanical PolishingSurface PolishingAbrasive MachiningAbrasive Process
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