Suspended Single‐Crystal Diamond Nanowires for High‐Performance Nanoelectromechanical Switches

Abstract

Single-crystal diamond nanowires with well-controlled dimensions are fabricated in batches for nanoelectromechanical system (NEMS). All-single-crystal diamond NEM switches are demonstrated using these nanowires with high reproducibility, high controllability, repeated switching, and no sitction. Diamond switches not only overcome the stiction and abrasion problems in existing electromechanical switches, but also circumvent the shallow doping problem. Detailed facts of importance to specialist readers are published as ”Supporting Information”. Such documents are peer-reviewed, but not copy-edited or typeset. They are made available as submitted by the authors. Please note: The publisher is not responsible for the content or functionality of any supporting information supplied by the authors. Any queries (other than missing content) should be directed to the corresponding author for the article.