Publication | Closed Access
Sizing particles on substrates. A general method for oblique incidence
25
Citations
16
References
1999
Year
EngineeringElectron-beam LithographyTarget FabricationOptic DesignExperimental Light-scattering MethodRayleigh ScatteringBeam OpticOptical PropertiesParticle TechnologyComputational ElectromagneticsNanophotonicsOblique IncidenceMaterials ScienceCylindrical ParticlesFabrication TechniqueIncident LightOptical Particle SizingMicrofabricationSurface ScienceApplied PhysicsLight Scattering
We have developed an experimental light-scattering method to size metallic spherical and cylindrical particles on flat substrates using obliquely incident light. We modify an earlier model to include effects such as the shadowing of the incident and scattered beams. We provide empirical expressions for sizing spheres and cylinders on substrates based on the positions of their minima. The results have been experimentally verified for both types of particle. The extension of the method to oblique incidence angles allows an alternative dynamic procedure.
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