Surface morphology of α-SIC coatings deposited by RF magnetron sputtering

Revised structure zone model for thin film physical structure

R. Messier, Anupam Giri, R. Roy · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1984 · 945 citations

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Ion-based methods for optical thin film deposition

Philip Martin · Journal of Materials Science · 1986 · 332 citations

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A low-temperature CVD process for silicon carbide MEMS

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Characterization of ultra-hard silicon carbide coatings deposited by RF magnetron sputtering

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Amorphous SiC coatings for WC cutting tools

A.K Costa, S.S. Camargo · Surface and Coatings Technology · 2002 · 52 citations

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