Comparative Study of Pore Size of Low-Dielectric-Constant Porous Spin-on-Glass Films Using Different Methods of Nondestructive Instrumentation

Abstract

The pore sizes of hydrogen-methyl-siloxane-based porous spin-on-glass (SOG) thin films having different k values ( k =1.8–2.5) are comparatively studied using different nondestructive instrumental ways and also with reference to sorption porosimetry. The pore size and its spread are found to increase with increasing porosity, or with decreasing dielectric constant.