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Micromachined fabrication of Si cantilevers with Schottky diodes integrated in the tip
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1998
Year
Electrical EngineeringWafer Scale ProcessingEngineeringMicromachinesMicrofabricationSemiconductor Device FabricationIntegrated CircuitsMicroelectronicsSi CantileversSchottky DiodesMicro-electromechanical System
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