Applied Surface Science · 2008 · 17 citations · 14 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsChemical Vapor DepositionEtching ProcessesSemiconductor Thin FilmsThin Film AnnealingThin Film EtchingThin-film MaterialsAnnealing Temperature EffectsChemical EtchingEtch ChemistryEtch MechanismsSurface EtchingWet Chemical EtchingWet Etching
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M. W. Cole, W. D. Nothwang, C. Hubbard et al. · Journal of Applied Physics · 2003 · 254 citations
Natural Sciences, Materials Engineering, Materials Science +17