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Al-doping effect on structural, transport and optical properties of ZnO films by simultaneous RF and DC magnetron sputtering

Materials ScienceMaterials EngineeringAluminium NitrideOptical MaterialsEngineeringNanoelectronicsOxide ElectronicsApplied PhysicsSimultaneous RfDc MagnetronGallium OxideAl-doping EffectThin Film Processing